Invention Publication
- Patent Title: NONVOLATILE MEMORY DEVICES AND MEMORY SYSTEMS INCLUDING THE SAME
-
Application No.: US18322714Application Date: 2023-05-24
-
Publication No.: US20240079280A1Publication Date: 2024-03-07
- Inventor: Do Hyung Kim , Ji Young Kim , Ji Won Kim , Suk Kang Sung , Woo Sung Yang
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Priority: KR 20220112690 2022.09.06
- Main IPC: H01L21/66
- IPC: H01L21/66

Abstract:
There is provided a nonvolatile memory device having improved crack detection reliability. The nonvolatile memory device comprises word lines that extend in a first direction, cell contact plugs that are electrically connected to the word lines and extend in a second direction intersecting the first direction, a net crack detection circuit that is on the word lines and is not in contact with the word lines, and a ring crack detection circuit that is on the word lines and is not in contact with the word lines, wherein the net crack detection circuit is electrically connected to a crack detection transistor in a peripheral circuit region, the ring crack detection circuit includes a first crack detection metal wiring that extends in a third direction intersecting the first direction and the second direction, and a second crack detection metal wiring that extends in the third direction.
Information query
IPC分类: