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公开(公告)号:US11715712B2
公开(公告)日:2023-08-01
申请号:US17323076
申请日:2021-05-18
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Sung-Min Hwang , Ji Won Kim , Jae Ho Ahn , Joon-Sung Lim , Suk Kang Sung
IPC: H01L23/00 , H01L25/065 , H01L25/18
CPC classification number: H01L24/08 , H01L23/562 , H01L25/0657 , H01L25/18 , H01L2224/08145 , H01L2924/1431 , H01L2924/14511 , H01L2924/3511
Abstract: A nonvolatile memory device includes an upper insulating layer. A first substrate is on the upper insulating layer. An upper interlayer insulating layer is on the first substrate. A plurality of word lines is stacked on the first substrate in a first direction and extends through a partial portion of the upper interlayer insulating layer. A lower interlayer insulating layer is on the upper interlayer insulating layer. A second substrate is on the lower interlayer insulating layer. A lower insulating layer is on the second substrate. A dummy pattern is composed of dummy material. The dummy pattern is disposed in a trench formed in at least one of the first and second substrates. The trench is formed on at least one of a surface where the upper insulating layer meets the first substrate, and a surface where the lower insulating layer meets the second substrate.
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公开(公告)号:US20240079280A1
公开(公告)日:2024-03-07
申请号:US18322714
申请日:2023-05-24
Applicant: Samsung Electronics Co., Ltd.
Inventor: Do Hyung Kim , Ji Young Kim , Ji Won Kim , Suk Kang Sung , Woo Sung Yang
IPC: H01L21/66
CPC classification number: H01L22/34
Abstract: There is provided a nonvolatile memory device having improved crack detection reliability. The nonvolatile memory device comprises word lines that extend in a first direction, cell contact plugs that are electrically connected to the word lines and extend in a second direction intersecting the first direction, a net crack detection circuit that is on the word lines and is not in contact with the word lines, and a ring crack detection circuit that is on the word lines and is not in contact with the word lines, wherein the net crack detection circuit is electrically connected to a crack detection transistor in a peripheral circuit region, the ring crack detection circuit includes a first crack detection metal wiring that extends in a third direction intersecting the first direction and the second direction, and a second crack detection metal wiring that extends in the third direction.
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公开(公告)号:US20240014157A1
公开(公告)日:2024-01-11
申请号:US18349017
申请日:2023-07-07
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Jae Ho Ahn , Ji Won Kim , Sung-Min Hwang , Joon-Sung Lim , Suk Kang Sung
IPC: H01L23/00 , H01L25/065 , H01L25/18 , H01L23/535 , H01L21/768 , H10B41/27 , H10B43/27
CPC classification number: H01L24/08 , H01L25/0657 , H01L25/18 , H01L23/535 , H01L21/76805 , H01L21/76895 , H10B41/27 , H10B43/27 , H01L2924/14511 , H01L2224/08145 , H01L2924/1431
Abstract: A nonvolatile memory device including a substrate extending in a first direction, a ground selection line extending in the first direction on the substrate, a plurality of word lines stacked sequentially on the ground selection line and extending in the first direction, a landing pad spaced apart from the ground selection line and the plurality of word lines in the first direction, a rear contact plug connected to a lower face of the landing pad and extending in a second direction intersecting the first direction, a front contact plug connected to an upper face of the landing pad opposite the lower face and extending in the second direction, an input/output pad electrically connected to the rear contact plug, and an upper bonding pad electrically connected to the front contact plug and connected to at least a part of a plurality of circuit elements of the nonvolatile memory device.
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公开(公告)号:US12094846B2
公开(公告)日:2024-09-17
申请号:US18349017
申请日:2023-07-07
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Jae Ho Ahn , Ji Won Kim , Sung-Min Hwang , Joon-Sung Lim , Suk Kang Sung
IPC: H01L25/065 , H01L21/768 , H01L23/00 , H01L23/535 , H01L25/18 , H10B41/27 , H10B43/27
CPC classification number: H01L24/08 , H01L21/76805 , H01L21/76895 , H01L23/535 , H01L25/0657 , H01L25/18 , H10B41/27 , H10B43/27 , H01L2224/08145 , H01L2924/1431 , H01L2924/14511
Abstract: A nonvolatile memory device including a substrate extending in a first direction, a ground selection line extending in the first direction on the substrate, a plurality of word lines stacked sequentially on the ground selection line and extending in the first direction, a landing pad spaced apart from the ground selection line and the plurality of word lines in the first direction, a rear contact plug connected to a lower face of the landing pad and extending in a second direction intersecting the first direction, a front contact plug connected to an upper face of the landing pad opposite the lower face and extending in the second direction, an input/output pad electrically connected to the rear contact plug, and an upper bonding pad electrically connected to the front contact plug and connected to at least a part of a plurality of circuit elements of the nonvolatile memory device.
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5.
公开(公告)号:US20240179910A1
公开(公告)日:2024-05-30
申请号:US18355718
申请日:2023-07-20
Applicant: Samsung Electronics Co., Ltd.
Inventor: Jun Hyoung Kim , Ji Won Kim , Ah Reum Lee , Suk Kang Sung
IPC: H10B43/27 , H01L23/00 , H01L25/065 , H01L25/18 , H10B80/00
CPC classification number: H10B43/27 , H01L24/08 , H01L25/0657 , H01L25/18 , H10B80/00 , H01L2224/08145 , H01L2924/1431 , H01L2924/14511
Abstract: A semiconductor memory device includes a cell substrate including a first surface and a second surface opposite to the first surface, a first mold stack including a plurality of first gate electrodes sequentially stacked on the first surface, a second mold stack including a plurality of second gate electrodes sequentially stacked on the first mold stack, a first channel structure extending in a first direction with respect to the first surface and crossing the plurality of first gate electrodes and the plurality of second gate electrodes, and an input/output pad on the second surface, wherein the first mold stack includes a mold opening that exposes a portion of the second mold stack, and at least a portion of the input/output pad overlaps the mold opening in the first direction.
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公开(公告)号:US20250071992A1
公开(公告)日:2025-02-27
申请号:US18604586
申请日:2024-03-14
Applicant: Samsung Electronics Co., Ltd.
Inventor: Min Yong Lee , Se Hoon Lee , Jun Hyoung Kim , Ji Young Kim , Suk Kang Sung
IPC: H10B43/27 , G11C16/04 , H01L23/528 , H01L25/065 , H10B41/10 , H10B41/27 , H10B41/35 , H10B41/41 , H10B43/10 , H10B43/35 , H10B43/40 , H10B80/00
Abstract: A semiconductor memory device may include a cell substrate including a first surface and a second surface opposite to the first surface, and a landing pattern including a third surface and a fourth surface opposite to the third surface, with the landing pattern spaced apart from the cell substrate in a horizontal direction. The semiconductor memory device may include a plurality of gate electrodes sequentially stacked on the first surface and the third surface, a channel structure on the cell substrate, the channel structure extending vertically and intersecting the plurality of gate electrodes, an upper insulating film covering the second surface and the fourth surface, an input/output pad on the upper insulating film, the input/output pad overlapping at least a portion of the plurality of gate electrodes in the vertical direction, and a support contact extending through the upper insulating film and connecting the landing pattern and the input/output pad.
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公开(公告)号:US20230403854A1
公开(公告)日:2023-12-14
申请号:US18180437
申请日:2023-03-08
Applicant: Samsung Electronics Co., Ltd.
Inventor: Ji Young Kim , Do Hyung Kim , Ji Won Kim , Suk Kang Sung
Abstract: According to some implementations of the present disclosure, a semiconductor memory device includes a semiconductor layer including a first face and a second face opposite to the first face in a first direction directed upward from the first face to the second face; a source structure including: a plate disposed on the second face of the semiconductor layer; and a plug extending from the plate through the semiconductor layer; a plurality of gate electrodes disposed on the first face of the semiconductor layer and sequentially stacked on one an other; and a channel structure that extends through the plurality of gate electrodes and that is disposed on the plug, wherein the channel structure is electrically connected to the source structure.
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公开(公告)号:US11956957B2
公开(公告)日:2024-04-09
申请号:US17203122
申请日:2021-03-16
Applicant: Samsung Electronics Co., Ltd.
Inventor: Ji Young Kim , Woo Sung Yang , Sung-Min Hwang , Suk Kang Sung , Joon-Sung Lim
Abstract: A semiconductor memory device includes a first stacked structure, a first supporter layer, a second stacked structure, a block cut structure, and a second supporter layer on the second stacked structure and separated by a second cut pattern. The first stacked structure includes a first and second stack, the second stacked structure includes a third stack separated by the block cut structure and a fourth stack, the first supporter layer is on the first stack and the second stack, the second supporter layer is on the third stack and the fourth stack, the first cut pattern includes a first connection on the block cut structure and connecting the first supporter layer and the second stack, and the second cut pattern of the second supporter layer includes a second connection on the block cut structure and connecting the second supporter layer placed on the third stack and the fourth stack.
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公开(公告)号:US11844211B2
公开(公告)日:2023-12-12
申请号:US17340148
申请日:2021-06-07
Applicant: Samsung Electronics Co., Ltd.
Inventor: Jae Ho Ahn , Ji Won Kim , Sung-Min Hwang , Joon-Sung Lim , Suk Kang Sung
IPC: H10B41/27 , H01L23/538 , H01L25/065 , H10B43/27
CPC classification number: H10B41/27 , H01L23/5384 , H01L25/0657 , H10B43/27
Abstract: A semiconductor memory device comprising: a first semiconductor chip including an upper input/output pad, a second semiconductor chip including a lower input/output pad, and a substrate attachment film attaching the first and second semiconductor chips. The first and second semiconductor chips each include a first substrate including a first side facing the substrate attachment film and a second side, a mold structure including gate electrodes, a channel structure penetrating the mold structure and intersecting the gate electrodes, a second substrate including a third side facing the first side and a fourth side, a first circuit element on the third side of the second substrate, and a contact via penetrating the first substrate and connected to the first circuit element. The upper and lower input/output pads are on the second sides of the first and second semiconductor chip, respectively, and contact the contact vias of the first and second semiconductor chips.
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公开(公告)号:US11728304B2
公开(公告)日:2023-08-15
申请号:US17240641
申请日:2021-04-26
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Jae Ho Ahn , Ji Won Kim , Sung-Min Hwang , Joon-Sung Lim , Suk Kang Sung
IPC: H01L25/065 , H01L23/00 , H01L25/18 , H01L23/535 , H01L21/768 , H10B41/27 , H10B43/27
CPC classification number: H01L24/08 , H01L21/76805 , H01L21/76895 , H01L23/535 , H01L25/0657 , H01L25/18 , H10B41/27 , H10B43/27 , H01L2224/08145 , H01L2924/1431 , H01L2924/14511
Abstract: A nonvolatile memory device including a substrate extending in a first direction, a ground selection line extending in the first direction on the substrate, a plurality of word lines stacked sequentially on the ground selection line and extending in the first direction, a landing pad spaced apart from the ground selection line and the plurality of word lines in the first direction, a rear contact plug connected to a lower face of the landing pad and extending in a second direction intersecting the first direction, a front contact plug connected to an upper face of the landing pad opposite the lower face and extending in the second direction, an input/output pad electrically connected to the rear contact plug, and an upper bonding pad electrically connected to the front contact plug and connected to at least a part of a plurality of circuit elements of the nonvolatile memory device.
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