发明公开
- 专利标题: TEMPERATURE DETECTION USING NEGATIVE TEMPERATURE COEFFICIENT RESISTOR IN GaN SETTING
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申请号: US17931670申请日: 2022-09-13
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公开(公告)号: US20240085247A1公开(公告)日: 2024-03-14
- 发明人: Santosh Sharma , Michael J. Zierak , Steven J. Bentley , Johnatan Avraham Kantarovsky
- 申请人: GlobalFoundries U.S. Inc.
- 申请人地址: US NY Malta
- 专利权人: GlobalFoundries U.S. Inc.
- 当前专利权人: GlobalFoundries U.S. Inc.
- 当前专利权人地址: US NY Malta
- 主分类号: G01K7/18
- IPC分类号: G01K7/18 ; H01C7/04 ; H01L27/06 ; H01L29/20 ; H01L29/205 ; H01L29/40 ; H01L29/778
摘要:
A structure includes a negative temperature coefficient (NTC) resistor for use in gallium nitride (GaN) technology. The NTC resistor includes a p-type doped GaN (pGaN) layer, and a gallium nitride (GaN) heterojunction structure under the pGaN layer. The GaN heterojunction structure includes a barrier layer and a channel layer. An isolation region extends across an interface of the barrier layer and the channel layer, and a first metal electrode is on the pGaN layer spaced from a second metal electrode on the pGaN layer. The NTC resistor can be used as a temperature compensated reference in a structure providing a temperature detection circuit. The temperature detection circuit includes an enhancement mode HEMT sharing parts with the NTC resistor and includes temperature independent current sources including depletion mode HEMTs.
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