METHOD FOR FABRICATING A LIQUID-CRYSTAL-BASED ELECTRO-OPTICAL LIGHT MODULATOR USING SURFACE MEMS TECHNIQUES FOR FLAT PANEL DISPLAY INSPECTION
Abstract:
An electro-optic modulator is a liquid-crystal-based electro-optical light modulator. The liquid-crystal-based electro-optical light modulator is fabricated using surface Micro-electromechanical Systems (MEMS) techniques. The electro-optical light modulator is used for inspecting flat panel displays or the like. Utilizing surface MEMS techniques for fabrication considerably thins the electro-optic modulator and allows the use of pure liquid crystal without the need for thick containment plates.
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