Invention Publication
- Patent Title: SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD USING THE SAME
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Application No.: US18447479Application Date: 2023-08-10
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Publication No.: US20240087856A1Publication Date: 2024-03-14
- Inventor: Jiwon Son , Sunggil Kang , Kangmin Do , Youngsun Kim , Younghoo Kim , Sangjin An
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Priority: KR 20220114463 2022.09.08
- Main IPC: H01J37/32
- IPC: H01J37/32 ; C23C16/455

Abstract:
A substrate treating apparatus includes a process chamber configured to perform plasma treatment, a substrate support in a lower portion of the process chamber and configured to support a substrate, a showerhead in an upper portion of the process chamber and configured to supply a process gas for the plasma treatment toward the substrate, and a baffle surrounding the substrate support. The substrate support functions as a first electrode for generating plasma, the showerhead and the baffle function as a second electrode for generating the plasma, the baffle has a variable height, and an area of the second electrode varies as a height of the baffle varies.
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