Invention Publication
- Patent Title: DEPOSITION DEVICE
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Application No.: US18468863Application Date: 2023-09-18
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Publication No.: US20240093347A1Publication Date: 2024-03-21
- Inventor: Jung Hyun AHN , JAESUK MOON , Seung Jin LEE
- Applicant: Samsung Display Co., LTD.
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., LTD.
- Current Assignee: Samsung Display Co., LTD.
- Current Assignee Address: KR Yongin-si
- Priority: KR 20220118201 2022.09.19
- Main IPC: C23C14/04
- IPC: C23C14/04 ; C23C14/12 ; C23C14/50 ; H10K71/16

Abstract:
An embodiment provides a deposition device including a magnet part that includes magnets; and a substrate support that faces the magnet part and that supports a substrate, the substrate support includes a support plate and patterns formed on a first surface of the support plate, and each of the patterns corresponds to a space between neighboring magnets among the magnets or corresponds to the magnets.
Information query
IPC分类: