Invention Publication
- Patent Title: PLASMA PROCESSING DEVICE, PLASMA PROCESSING METHOD, AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD
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Application No.: US18450625Application Date: 2023-08-16
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Publication No.: US20240096593A1Publication Date: 2024-03-21
- Inventor: Toshiyuki SASAKI
- Applicant: Kioxia Corporation
- Applicant Address: JP Tokyo
- Assignee: Kioxia Corporation
- Current Assignee: Kioxia Corporation
- Current Assignee Address: JP Tokyo
- Priority: JP 22147666 2022.09.16
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H01L21/311

Abstract:
A plasma processing device includes a chamber, a plurality of direct current power supplies, and a controller. The direct current power supplies are provided in an upper portion and on a side wall of the chamber, wherein the direct current power supplies are configured to operate individually. The controller is configured to control the direct current power supplies such that the direct current power supplies apply respective direct current voltages independent of each other.
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