• Patent Title: Multi-Beam Vertical Probes with Independent Arms Formed of a High Conductivity Metal for Enhancing Current Carrying Capacity and Methods for Making Such Probes
  • Application No.: US17488176
    Application Date: 2021-09-28
  • Publication No.: US20240103040A1
    Publication Date: 2024-03-28
  • Inventor: Uri Frodis
  • Applicant: Microfabrica Inc.
  • Applicant Address: US CA Van Nuys
  • Assignee: Microfabrica Inc.
  • Current Assignee: Microfabrica Inc.
  • Current Assignee Address: US CA Van Nuys
  • Main IPC: G01R1/067
  • IPC: G01R1/067 G01R1/073 G01R3/00
Multi-Beam Vertical Probes with Independent Arms Formed of a High Conductivity Metal for Enhancing Current Carrying Capacity and Methods for Making Such Probes
Abstract:
Vertical probes, formed of at least one layer that longitudinally includes a first and a second end and a central portion, with the central portion including at least three compliant arms wherein each of the two outer arms include a material having a yield strength greater than a first amount and the at least one intermediate arm is formed of a material having a yield strength less than the first yield strength amount wherein a yield strength of the material of the intermediate arm has a ratio to that of an outer arm of less than 1, more preferably less than 0.8, even more preferably less than 0.6, and most preferably less than 0.4.
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