- 专利标题: TRIM PATTERNING FOR FORMING ANGLED TRANSISTORS
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申请号: US17935652申请日: 2022-09-27
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公开(公告)号: US20240105798A1公开(公告)日: 2024-03-28
- 发明人: Abhishek A. Sharma , Tahir Ghani , Anand S. Murthy , Elliot Tan , Shem Ogadhoh , Sagar Suthram , Pushkar Sharad Ranade , Wilfred Gomes
- 申请人: Abhishek A. Sharma , Tahir Ghani , Anand S. Murthy , Elliot Tan , Shem Ogadhoh , Sagar Suthram , Pushkar Sharad Ranade , Wilfred Gomes
- 申请人地址: US OR Hillsboro
- 专利权人: Abhishek A. Sharma,Tahir Ghani,Anand S. Murthy,Elliot Tan,Shem Ogadhoh,Sagar Suthram,Pushkar Sharad Ranade,Wilfred Gomes
- 当前专利权人: Abhishek A. Sharma,Tahir Ghani,Anand S. Murthy,Elliot Tan,Shem Ogadhoh,Sagar Suthram,Pushkar Sharad Ranade,Wilfred Gomes
- 当前专利权人地址: US OR Hillsboro
- 主分类号: H01L29/423
- IPC分类号: H01L29/423 ; H01L29/775 ; H01L29/78 ; H01L29/786
摘要:
An example IC device formed using trim patterning as described herein may include a support structure, a first elongated structure (e.g., a first fin or nanoribbon) and a second elongated structure (e.g., a second fin or nanoribbon), proximate to an end of the first elongated structure. An angle between a projection of the first elongated structure on the support structure and an edge of the support structure may be between about 5 and 45 degrees, while an angle between a projection of the second elongated structure on the support structure and the edge of the support structure may be less than about 15 degrees.
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