Invention Publication
- Patent Title: LASER CRYSTALLIZATION APPARATUS AND LASER CRYSTALLIZATION METHOD
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Application No.: US18199578Application Date: 2023-05-19
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Publication No.: US20240112911A1Publication Date: 2024-04-04
- Inventor: Heegwan RYU , Jaesung GU , Deokjae KIM , Dongchan SEO , Younghoon OH , Yujin OH , Eunji LIM
- Applicant: Samsung Display Co., LTD.
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., LTD.
- Current Assignee: Samsung Display Co., LTD.
- Current Assignee Address: KR Yongin-si
- Priority: KR 20220125223 2022.09.30
- Main IPC: H01L21/02
- IPC: H01L21/02 ; B23K26/0622 ; H01L21/67

Abstract:
A laser crystallization apparatus includes: a plurality of laser generators which generates an incident laser beam; an optical system which optically converts the incident laser beam to an output laser beam; a process chamber in which a thin film formed on a substrate is crystallized by the output laser beam radiated thereto; a first monitoring device which detects a synthesized pulse of the output laser beam; a second monitoring device which detects individual pulses of the incident laser beam; and a controller which controls oscillation times of the plurality of laser generators. The controller generates a plurality of synthesized pulses by combining the individual pulses of the incident laser beam, and derives an optimal synthesized pulse from the plurality of synthesized pulses.
Information query
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