公开(公告)号：US20240112911A1

公开(公告)日：2024-04-04

申请号：US18199578

申请日：2023-05-19

Applicant: Samsung Display Co., LTD.

Inventor： Heegwan RYU ,  Jaesung GU ,  Deokjae KIM ,  Dongchan SEO ,  Younghoon OH ,  Yujin OH ,  Eunji LIM

IPC: H01L21/02 ,  B23K26/0622 ,  H01L21/67

CPC classification number: H01L21/02686 ,  B23K26/0622 ,  H01L21/67115 ,  H01L21/67253 ,  H01L2021/775

Abstract: A laser crystallization apparatus includes: a plurality of laser generators which generates an incident laser beam; an optical system which optically converts the incident laser beam to an output laser beam; a process chamber in which a thin film formed on a substrate is crystallized by the output laser beam radiated thereto; a first monitoring device which detects a synthesized pulse of the output laser beam; a second monitoring device which detects individual pulses of the incident laser beam; and a controller which controls oscillation times of the plurality of laser generators. The controller generates a plurality of synthesized pulses by combining the individual pulses of the incident laser beam, and derives an optimal synthesized pulse from the plurality of synthesized pulses.