Invention Publication
- Patent Title: SEMICONDUCTOR MEMORY DEVICES
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Application No.: US18544996Application Date: 2023-12-19
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Publication No.: US20240119984A1Publication Date: 2024-04-11
- Inventor: Jaeho Hong , Hyuncheol Kim , Yongseok Kim , Ilgweon Kim , Hyeoungwon Seo , Sungwon Yoo , Kyunghwan Lee
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR SUWON-SI
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR SUWON-SI
- Priority: KR 20200129507 2020.10.07
- Main IPC: G11C11/402
- IPC: G11C11/402 ; G11C11/39 ; H01L27/102 ; H01L29/66 ; H01L29/749

Abstract:
A semiconductor memory device according to the present inventive concept includes: a semiconductor substrate; a common source semiconductor layer doped with impurities of a first conductivity type on the semiconductor substrate; a plurality of insulating layers and a plurality of word line structures alternately stacked on the common source semiconductor layer; and a memory cell dielectric layer penetrating the plurality of insulating layers and the plurality of word line structures and covering an internal wall of a channel hole extending in a vertical direction, and a memory cell structure filling the channel hole. The memory cell structure includes a channel layer, which has the memory cell dielectric layer thereon and fills at least a portion of the channel hole, and a drain layer covering an upper surface of the channel layer, doped with impurities of a second conductivity type, and filling some of an upper portion of the channel hole.
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