Semiconductor memory devices
    1.
    发明授权

    公开(公告)号:US11887648B2

    公开(公告)日:2024-01-30

    申请号:US17362138

    申请日:2021-06-29

    摘要: A semiconductor memory device according to the present inventive concept includes: a semiconductor substrate; a common source semiconductor layer doped with impurities of a first conductivity type on the semiconductor substrate; a plurality of insulating layers and a plurality of word line structures alternately stacked on the common source semiconductor layer; and a memory cell dielectric layer penetrating the plurality of insulating layers and the plurality of word line structures and covering an internal wall of a channel hole extending in a vertical direction, and a memory cell structure filling the channel hole. The memory cell structure includes a channel layer, which has the memory cell dielectric layer thereon and fills at least a portion of the channel hole, and a drain layer covering an upper surface of the channel layer, doped with impurities of a second conductivity type, and filling some of an upper portion of the channel hole.

    Memory device using semiconductor element

    公开(公告)号:US11798616B2

    公开(公告)日:2023-10-24

    申请号:US17901982

    申请日:2022-09-02

    摘要: A first semiconductor layer 1 is formed on a substrate, a first impurity layer 3 and a second impurity layer 4 extending in a vertical direction are sequentially disposed on part of the first semiconductor layer 1, their sidewalls and the semiconductor layer 1 are covered by a second gate insulating layer 2, a gate conductor layer 22 and a second insulating layer are disposed in a groove formed there, and a second semiconductor layer 7, n+ layers 6a and 6c positioned at respective ends of the layer 7 and connected to a source line SL and a bit line BL, respectively, a second gate insulating layer 8 formed to cover the second semiconductor layer 7, and a second gate conductor layer 9 connected to a word line WL are disposed on the second impurity layer. Voltage applied to the source line SL, a plate line PL connected to the first gate conductor layer 22, the word line WL, and the bit line BL is controlled to perform data holding operation of holding, near the gate insulating layer, holes generated by an impact ionization phenomenon in a channel region of the second semiconductor layer or by gate-induced drain leakage current, and data erase operation of removing the holes in the channel region 12.