Invention Publication
- Patent Title: SCANNING PROBE MICROSCOPE
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Application No.: US18380309Application Date: 2023-10-16
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Publication No.: US20240126061A1Publication Date: 2024-04-18
- Inventor: Masanari Koguchi , Teruo Kohashi , Tomihiro Hashizume
- Applicant: Hitachi, Ltd.
- Applicant Address: JP Tokyo
- Assignee: Hitachi, Ltd.
- Current Assignee: Hitachi, Ltd.
- Current Assignee Address: JP Tokyo
- Priority: JP 22166817 2022.10.18
- Main IPC: G02B21/04
- IPC: G02B21/04 ; G01Q30/02 ; G01Q70/14 ; G02B21/00

Abstract:
To provide a scanning probe microscope capable of easily determining a measurement location even when a numerical aperture of an objective lens is relatively large. The scanning probe microscope comprises: a probe which scans a sample; a light source which irradiates the probe with excitation light via an objective lens; and a detector which detects fluorescence generated at the probe. The scanning probe microscope further includes: a reflective member arranged between the objective lens and the sample; and an imaging device which images a reflecting surface of the reflective member.
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