A method for fabricating a working stamp for forming surface gratings in a waveguide workpiece includes performing a series of step lithography processes using a series of master stamps so as to form a working stamp having a first surface having a plurality of surface gratings formed therein. Each step lithography process includes pressing a master stamp of the series of master stamps into a material layer of a working stamp workpiece at a corresponding region of the material layer, the master stamp having a plurality of surface grating patterns formed thereon. Each step lithography process further includes applying ultraviolet light to the corresponding region to locally cure the material layer at the corresponding region and detaching the master stamp from the material of the working stamp after applying the ultraviolet light.