公开(公告)号：US20250116804A1

公开(公告)日：2025-04-10

申请号：US18484024

申请日：2023-10-10

Applicant: GOOGLE LLC

Inventor： Huihang Dong ,  Warren Cornelius Welch, III ,  Kang Luo ,  Wei Jin

IPC: F21V8/00 ,  G02B26/10 ,  G02B27/00 ,  G02B27/01

Abstract: A waveguide includes a set of grating structures forming a component on the surface of the waveguide. The set of grating structures is configured to direct light received at the component based on a parameter of one or more grating structures of the set of grating structures. Further, the waveguide includes a first transition area disposed adjacent to a first side of the component wherein the parameter is modulated across the grating structures of the first transition area. Additionally, the waveguide includes a second transition area disposed adjacent to a second, opposite side of the component wherein the parameter is also modulated across the grating structures of the second transition area.

公开(公告)号：US20240231221A9

公开(公告)日：2024-07-11

申请号：US18489404

申请日：2023-10-18

Applicant: GOOGLE LLC

Inventor： Lu Tian ,  Wei Jin ,  Thomas Mercier

IPC: G03F7/00 ,  G02B6/34 ,  G02B27/01 ,  G03F7/40

CPC classification number: G03F7/0002 ,  G02B6/34 ,  G02B27/0172 ,  G03F7/0005 ,  G03F7/0007 ,  G03F7/40 ,  G02B2027/0178

Abstract: A method for fabricating a working stamp for forming surface gratings in a waveguide workpiece includes performing a series of step lithography processes using a series of master stamps so as to form a working stamp having a first surface having a plurality of surface gratings formed therein. Each step lithography process includes pressing a master stamp of the series of master stamps into a material layer of a working stamp workpiece at a corresponding region of the material layer, the master stamp having a plurality of surface grating patterns formed thereon. Each step lithography process further includes applying ultraviolet light to the corresponding region to locally cure the material layer at the corresponding region and detaching the master stamp from the material of the working stamp after applying the ultraviolet light.

公开(公告)号：US20240192606A1

公开(公告)日：2024-06-13

申请号：US18080431

申请日：2022-12-13

Applicant: GOOGLE LLC

Inventor： Lu Tian ,  Wei Jin ,  Joseph Daniel Lowney ,  Thomas Mercier

IPC: G03F7/20 ,  G03F1/70

CPC classification number: G03F7/70216 ,  G03F1/70 ,  G03F7/2022

Abstract: Systems and methods are provided for generating a two-dimensional pattern on a photoresist layer. A photoresist layer is exposed via a first exposure to a first unidimensional series of features alternatingly providing first minima and maxima of illumination intensity along a first dimension. The photoresist layer is then exposed via a second exposure to a second unidimensional series of features alternatingly providing second minima and maxima of illumination intensity along a second dimension that is angularly separated from the second dimension by an exposure rotation factor.

公开(公告)号：US20250162337A1

公开(公告)日：2025-05-22

申请号：US18515631

申请日：2023-11-21

Applicant: GOOGLE LLC

Inventor： Wei Jin ,  Lu Tian ,  Kang Luo ,  Nai-Wen Pi ,  Thomas Mercier

IPC: B41M5/00 ,  B41M3/00 ,  G02B6/34

Abstract: Optical waveguides are formed based on measured parameters of an optical substrate. Regions for forming one or more optical elements are identified based on these measurements, and inkjet deposition is utilized to deposit a refraction-matched deposition material is applied to one or more identified regions to selectively modify the total thickness variation (TTV) in each such region. Prior to or subsequent to the deposition, optical gratings or other optical elements are formed within the adjusted regions.

公开(公告)号：US20240134271A1

公开(公告)日：2024-04-25

申请号：US18489404

申请日：2023-10-17

Applicant: GOOGLE LLC

Inventor： Lu Tian ,  Wei Jin ,  Thomas Mercier

IPC: G03F7/00 ,  G02B6/34 ,  G02B27/01 ,  G03F7/40

CPC classification number: G03F7/0002 ,  G02B6/34 ,  G02B27/0172 ,  G03F7/0005 ,  G03F7/0007 ,  G03F7/40 ,  G02B2027/0178

Abstract: A method for fabricating a working stamp for forming surface gratings in a waveguide workpiece includes performing a series of step lithography processes using a series of master stamps so as to form a working stamp having a first surface having a plurality of surface gratings formed therein. Each step lithography process includes pressing a master stamp of the series of master stamps into a material layer of a working stamp workpiece at a corresponding region of the material layer, the master stamp having a plurality of surface grating patterns formed thereon. Each step lithography process further includes applying ultraviolet light to the corresponding region to locally cure the material layer at the corresponding region and detaching the master stamp from the material of the working stamp after applying the ultraviolet light.

公开(公告)号：US20240134198A1

公开(公告)日：2024-04-25

申请号：US18372222

申请日：2023-09-24

Applicant: GOOGLE LLC

Inventor： Wei Jin ,  Joseph Daniel Lowney ,  Lu Tian ,  Qinglan Huang ,  Thomas Mercier

IPC: G02B27/01 ,  G02B6/34

CPC classification number: G02B27/0172 ,  G02B6/34 ,  G02B2027/0178

Abstract: An augmented-reality (AR) eyewear display utilizes an optical waveguide having multi-layered optical gratings in a repeating arrangement. The optical gratings include varying depths, slope angles, lengths, and/or widths in order to tune the gratings to provide an improved AR eyewear display. By using the different configurations of two-dimensional or three-dimensional gratings disclosed herein in a waveguide of an AR eyewear display, optical characteristics of the waveguide are optimized to provide, e.g., high resolution and/or contrast, high display uniformity, high input coupling efficiency, and/or high output coupling efficiency. Accordingly, in some embodiments, aspects of the present disclosure enable lower-power AR eyewear displays to produce the same quality of display of a higher-power conventional AR eyewear display waveguide.

公开(公告)号：US20240085782A1

公开(公告)日：2024-03-14

申请号：US17932016

申请日：2022-09-14

Applicant: GOOGLE LLC

Inventor： Wei Jin ,  Lu Tian ,  Thomas Mercier

IPC: G03F7/00 ,  F21V8/00 ,  G03F7/16

CPC classification number: G03F7/0002 ,  G02B6/0065 ,  G03F7/162 ,  G02B6/0026 ,  G02B6/005

Abstract: An improved nanoimprint lithography process is presented in which the height is controlled by the thickness of a residual layer of resin leftover after ultraviolet curing and releasing of a nanoimprint mold from a resin layer. Moreover, the thickness of the residual layer may be controlled by a fill factor of either a nanoimprint mold that transfers its pattern to a resin layer disposed on a substrate, or by droplets of resin in the resin layer.

公开(公告)号：US20250076551A1

公开(公告)日：2025-03-06

申请号：US18728520

申请日：2022-12-06

Applicant: GOOGLE LLC

Inventor： Joseph Daniel Lowney ,  Wei Jin

IPC: G02B5/18 ,  G02B6/12 ,  G02B6/34 ,  G02B27/01

Abstract: The present disclosure provides techniques to reduce or eliminate contaminants in a waveguide resulting from the waveguide fabrication process. A blocking layer is deposited on a grating layer to protect the grating layer from contamination, e.g., via diffusion, from a hardmask layer that is used to pattern the grating layer. Accordingly, the optical gratings resulting from the patterning of the grating layer have little or no contamination from the hardmask layer, thereby increasing the optical performance of the final waveguide product.

公开(公告)号：US20240427236A1

公开(公告)日：2024-12-26

申请号：US18755207

申请日：2024-06-26

Applicant: GOOGLE LLC

Inventor： Lu Tian ,  Wei Jin ,  Kang Luo ,  Thomas Mercier

IPC: G03F7/00 ,  B29C59/00 ,  B29C59/02 ,  G02B6/13

Abstract: A method of nanoimprinting a waveguide includes forming a working stamp having at least one waveguide feature pattern and at least one process control feature pattern. The working stamp is pressed into a waveguide workpiece thereby forming waveguide features in one or more functional waveguide zones of the waveguide workpiece and one or more sets of process control features in one or more regions outside of the one or more functional waveguide zones. The working stamp is detached from the waveguide workpiece.

公开(公告)号：US20240361598A1

公开(公告)日：2024-10-31

申请号：US18139603

申请日：2023-04-26

Applicant: GOOGLE LLC

Inventor： Qinglan Huang ,  Wei Jin ,  Joseph Daniel Lowney

IPC: G02B27/01

CPC classification number: G02B27/0172 ,  G02B2027/0178

Abstract: Methods and apparatuses for applying anti-reflective structures to a waveguide of an augmented reality display device include producing two initial molds: one formed with high precision for diffractive optical structures, and one formed with lower precision for anti-reflective structures. The two initial molds are imprinted into a single resist layer to form an integrated mold, which is then usable to simultaneously form both diffractive optical structures and anti-reflective structures. Accordingly, the cost of producing the anti-reflective structures is minimized while the efficiency of forming the diffractive optical structures and anti-reflective structures is maximized.