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公开(公告)号：US20240427236A1
公开(公告)日：2024-12-26
申请号：US18755207
申请日：2024-06-26
Applicant: GOOGLE LLC
Inventor： Lu Tian , Wei Jin , Kang Luo , Thomas Mercier
Abstract: A method of nanoimprinting a waveguide includes forming a working stamp having at least one waveguide feature pattern and at least one process control feature pattern. The working stamp is pressed into a waveguide workpiece thereby forming waveguide features in one or more functional waveguide zones of the waveguide workpiece and one or more sets of process control features in one or more regions outside of the one or more functional waveguide zones. The working stamp is detached from the waveguide workpiece.
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2.发明公开公开(公告)号：US20240231100A9
公开(公告)日：2024-07-11
申请号：US18372222
申请日：2023-09-25
Applicant: GOOGLE LLC
Inventor： Wei Jin , Joseph Daniel Lowney , Lu Tian , Qinglan Huang , Thomas Mercier
CPC classification number: G02B27/0172 , G02B6/34 , G02B2027/0178
Abstract: An augmented-reality (AR) eyewear display utilizes an optical waveguide having multi-layered optical gratings in a repeating arrangement. The optical gratings include varying depths, slope angles, lengths, and/or widths in order to tune the gratings to provide an improved AR eyewear display. By using the different configurations of two-dimensional or three-dimensional gratings disclosed herein in a waveguide of an AR eyewear display, optical characteristics of the waveguide are optimized to provide, e.g., high resolution and/or contrast, high display uniformity, high input coupling efficiency, and/or high output coupling efficiency. Accordingly, in some embodiments, aspects of the present disclosure enable lower-power AR eyewear displays to produce the same quality of display of a higher-power conventional AR eyewear display waveguide.
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3.发明公开公开(公告)号：US20240168207A1
公开(公告)日：2024-05-23
申请号：US18489397
申请日：2023-10-18
Applicant: GOOGLE LLC
Inventor： Lu Tian , Wei Jin , Thomas Mercier
CPC classification number: G02B5/1857 , G02B6/0065 , G02B27/0172 , G02B2027/0178
Abstract: A method for fabricating a working stamp for forming slanted surface gratings in a waveguide workpiece includes providing a master workpiece comprising a substrate and performing a sequence of photoresist deposition processes, grayscale lithography processes, and etching processes on the master workpiece so as to form an imprint replication master having a pattern of slanted gratings in a working surface of its substrate, the slanted gratings having sidewalls that are not substantially orthogonal to a working surface of the substrate. The method also includes conforming a soft stamp material layer to the working surface of the imprint replication master so that the soft stamp material layer has a pattern of slanted protrusions corresponding to the pattern of slanted gratings, and removing the imprint replication master from the soft stamp material and curing the soft stamp material layer surrounding the pattern of slanted protrusions to form the working stamp.
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4.发明公开公开(公告)号：US20240134271A1
公开(公告)日：2024-04-25
申请号：US18489404
申请日：2023-10-17
Applicant: GOOGLE LLC
Inventor： Lu Tian , Wei Jin , Thomas Mercier
CPC classification number: G03F7/0002 , G02B6/34 , G02B27/0172 , G03F7/0005 , G03F7/0007 , G03F7/40 , G02B2027/0178
Abstract: A method for fabricating a working stamp for forming surface gratings in a waveguide workpiece includes performing a series of step lithography processes using a series of master stamps so as to form a working stamp having a first surface having a plurality of surface gratings formed therein. Each step lithography process includes pressing a master stamp of the series of master stamps into a material layer of a working stamp workpiece at a corresponding region of the material layer, the master stamp having a plurality of surface grating patterns formed thereon. Each step lithography process further includes applying ultraviolet light to the corresponding region to locally cure the material layer at the corresponding region and detaching the master stamp from the material of the working stamp after applying the ultraviolet light.
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5.发明公开公开(公告)号：US20240134198A1
公开(公告)日：2024-04-25
申请号：US18372222
申请日：2023-09-24
Applicant: GOOGLE LLC
Inventor： Wei Jin , Joseph Daniel Lowney , Lu Tian , Qinglan Huang , Thomas Mercier
CPC classification number: G02B27/0172 , G02B6/34 , G02B2027/0178
Abstract: An augmented-reality (AR) eyewear display utilizes an optical waveguide having multi-layered optical gratings in a repeating arrangement. The optical gratings include varying depths, slope angles, lengths, and/or widths in order to tune the gratings to provide an improved AR eyewear display. By using the different configurations of two-dimensional or three-dimensional gratings disclosed herein in a waveguide of an AR eyewear display, optical characteristics of the waveguide are optimized to provide, e.g., high resolution and/or contrast, high display uniformity, high input coupling efficiency, and/or high output coupling efficiency. Accordingly, in some embodiments, aspects of the present disclosure enable lower-power AR eyewear displays to produce the same quality of display of a higher-power conventional AR eyewear display waveguide.
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Patent Agency Ranking
公开(公告)号：US20240085782A1
公开(公告)日：2024-03-14
申请号：US17932016
申请日：2022-09-14
Applicant: GOOGLE LLC
Inventor： Wei Jin , Lu Tian , Thomas Mercier
CPC classification number: G03F7/0002 , G02B6/0065 , G03F7/162 , G02B6/0026 , G02B6/005
Abstract: An improved nanoimprint lithography process is presented in which the height is controlled by the thickness of a residual layer of resin leftover after ultraviolet curing and releasing of a nanoimprint mold from a resin layer. Moreover, the thickness of the residual layer may be controlled by a fill factor of either a nanoimprint mold that transfers its pattern to a resin layer disposed on a substrate, or by droplets of resin in the resin layer.
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7.发明公开公开(公告)号：US20240231221A9
公开(公告)日：2024-07-11
申请号：US18489404
申请日：2023-10-18
Applicant: GOOGLE LLC
Inventor： Lu Tian , Wei Jin , Thomas Mercier
CPC classification number: G03F7/0002 , G02B6/34 , G02B27/0172 , G03F7/0005 , G03F7/0007 , G03F7/40 , G02B2027/0178
Abstract: A method for fabricating a working stamp for forming surface gratings in a waveguide workpiece includes performing a series of step lithography processes using a series of master stamps so as to form a working stamp having a first surface having a plurality of surface gratings formed therein. Each step lithography process includes pressing a master stamp of the series of master stamps into a material layer of a working stamp workpiece at a corresponding region of the material layer, the master stamp having a plurality of surface grating patterns formed thereon. Each step lithography process further includes applying ultraviolet light to the corresponding region to locally cure the material layer at the corresponding region and detaching the master stamp from the material of the working stamp after applying the ultraviolet light.
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公开(公告)号：US20240192606A1
公开(公告)日：2024-06-13
申请号：US18080431
申请日：2022-12-13
Applicant: GOOGLE LLC
Inventor： Lu Tian , Wei Jin , Joseph Daniel Lowney , Thomas Mercier
CPC classification number: G03F7/70216 , G03F1/70 , G03F7/2022
Abstract: Systems and methods are provided for generating a two-dimensional pattern on a photoresist layer. A photoresist layer is exposed via a first exposure to a first unidimensional series of features alternatingly providing first minima and maxima of illumination intensity along a first dimension. The photoresist layer is then exposed via a second exposure to a second unidimensional series of features alternatingly providing second minima and maxima of illumination intensity along a second dimension that is angularly separated from the second dimension by an exposure rotation factor.
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公开(公告)号：US20250162337A1
公开(公告)日：2025-05-22
申请号：US18515631
申请日：2023-11-21
Applicant: GOOGLE LLC
Inventor： Wei Jin , Lu Tian , Kang Luo , Nai-Wen Pi , Thomas Mercier
Abstract: Optical waveguides are formed based on measured parameters of an optical substrate. Regions for forming one or more optical elements are identified based on these measurements, and inkjet deposition is utilized to deposit a refraction-matched deposition material is applied to one or more identified regions to selectively modify the total thickness variation (TTV) in each such region. Prior to or subsequent to the deposition, optical gratings or other optical elements are formed within the adjusted regions.
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公开(公告)号：US20250076563A1
公开(公告)日：2025-03-06
申请号：US18810012
申请日：2024-08-20
Applicant: GOOGLE LLC
Inventor： Kang Luo , Thomas Mercier , Christophe Peroz
Abstract: A fabrication process uses casting to form portions of a waveguide having ultra-flat surfaces. A casting resin is coated between a prism mold and a top flat mold via inkjet, slot die, spray coating, etc. The top flat mold is lowered to conform with the casting resin and the casting resin is then cured to form a bottom prism array. After curing, the bottom prism array is demolded from the prism mold and the top flat mold is used as a carrier wafer to support the bottom prism array. The bottom prism array is selectively coated with a reflective coating and a second casting process is performed by coating the bottom prism array with casting resin to form a reflective waveguide.
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