Invention Publication
- Patent Title: FREQUENCY-VARIABLE POWER SUPPLY AND PLASMA PROCESSING APPARATUS
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Application No.: US18382809Application Date: 2023-10-22
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Publication No.: US20240136154A1Publication Date: 2024-04-25
- Inventor: Kazushi KANEKO
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Priority: JP 22170045 2022.10.23
- Main IPC: H01J37/32
- IPC: H01J37/32
Abstract:
A frequency-variable power supply that outputs radio-frequency (RF) waves of a set frequency and includes an operation part configured to calculate a correction value according to each of a plurality of frequencies within an outputtable frequency range.
Public/Granted literature
- US20240234092A9 FREQUENCY-VARIABLE POWER SUPPLY AND PLASMA PROCESSING APPARATUS Public/Granted day:2024-07-11
Information query
