Invention Publication
- Patent Title: APPARATUS FOR PROCESSING CHEMICAL LIQUID
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Application No.: US18375177Application Date: 2023-09-29
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Publication No.: US20240139699A1Publication Date: 2024-05-02
- Inventor: Donghwa Lee , Daigeon Yoon , Bongman Choi , Soohong Lee , Daesung Kim
- Applicant: SEMES CO., LTD.
- Applicant Address: KR Cheonan-si
- Assignee: SEMES CO., LTD.
- Current Assignee: SEMES CO., LTD.
- Current Assignee Address: KR Cheonan-si
- Priority: KR 20220142465 2022.10.31
- Main IPC: B01J8/08
- IPC: B01J8/08

Abstract:
The disclosure provides a chemical liquid supply apparatus including a chemical liquid storage tank storing a chemical liquid including a plurality of nanorods, a circulation pipe having both ends connected to the chemical liquid storage tank and including a first branch pipe and a second branch pipe, a classifier located at the second branch pipe and including a classification chip and a power supply, and a discharge pipe configured to discharge the chemical liquid to an outside of the circulation pipe, wherein the classification chip collects and releases nanorods of a certain size among the plurality of nanorods, the discharge pipe discharges the nanorods of the certain size to the outside before the nanorods of the certain size released by the classification chip are returned to the chemical liquid storage tank, and the power supply supplies an alternating current to the classification chip.
Information query