- 专利标题: SEMICONDUCTOR DEVICE STRUCTURE INCLUDING A BONDING STRUCTURE
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申请号: US18367609申请日: 2023-09-13
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公开(公告)号: US20240153902A1公开(公告)日: 2024-05-09
- 发明人: SHENG-FU HUANG , SHING-YIH SHIH
- 申请人: NANYA TECHNOLOGY CORPORATION
- 申请人地址: TW New Taipei City
- 专利权人: NANYA TECHNOLOGY CORPORATION
- 当前专利权人: NANYA TECHNOLOGY CORPORATION
- 当前专利权人地址: TW New Taipei City
- 分案原申请号: US18053290 2022.11.07
- 主分类号: H01L23/00
- IPC分类号: H01L23/00
摘要:
A semiconductor device structure and method for manufacturing the same are provided. The semiconductor device structure includes a substrate, a dielectric structure, a pad, a conductive structure, and a buffer structure. The dielectric structure is disposed on the substrate. The pad is embedded in the dielectric structure. The conductive structure is disposed on the pad. The buffer structure is disposed on the pad and separates the conductive structure from the dielectric structure. A coefficient of thermal expansion (CTE) of the buffer structure ranges between a CTE of the dielectric structure and a CTE of the conductive structure.
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