Invention Publication
- Patent Title: INDIUM PRECURSOR COMPOUND, METHOD OF PREPARING THIN FILM USING THE SAME, AND BOARD PREPARED USING THE SAME
-
Application No.: US17773287Application Date: 2020-10-28
-
Publication No.: US20240167151A1Publication Date: 2024-05-23
- Inventor: Chang Bong YEON , Jin Hee KIM , Jae Sun JUNG , Seok Jong LEE
- Applicant: SOULBRAIN CO., LTD.
- Applicant Address: KR Gyeonggi-do
- Assignee: SOULBRAIN CO., LTD.
- Current Assignee: SOULBRAIN CO., LTD.
- Current Assignee Address: KR Gyeonggi-do
- Priority: KR 20190136318 2019.10.30 KR 20200140859 2020.10.28
- International Application: PCT/KR2020/014801 2020.10.28
- Date entered country: 2022-04-29
- Main IPC: C23C16/18
- IPC: C23C16/18 ; C23C16/40 ; C23C16/455
Abstract:
The present invention relates to an indium precursor compound, a method of preparing a thin film using the same, and a board prepared using the same. More particularly, the present invention relates to an indium precursor compound represented by Chemical Formula 1, a method of preparing a thin film using the same, and a board prepared using the same.
According to the present invention, a uniform thin film may be formed, productivity may be increased due to an increased deposition rate, thermal stability and storage stability may be excellent, and an effect of easy handling may be obtained.
According to the present invention, a uniform thin film may be formed, productivity may be increased due to an increased deposition rate, thermal stability and storage stability may be excellent, and an effect of easy handling may be obtained.
Public/Granted literature
- US12281383B2 Indium precursor compound, method of preparing thin film using the same, and board prepared using the same Public/Granted day:2025-04-22
Information query
IPC分类:
