Invention Publication
- Patent Title: SYSTEMS AND APPARATUS FOR SEMICONDUCTOR EQUIPMENT
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Application No.: US18510043Application Date: 2023-11-15
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Publication No.: US20240167160A1Publication Date: 2024-05-23
- Inventor: Ankit Kimtee , Sudhanshu Biyani , Kyle Fondurulia , Yeonsu Rhee , Shubham Garg
- Applicant: ASM IP Holding B.V.
- Applicant Address: NL Almere
- Assignee: ASM IP Holding B.V.
- Current Assignee: ASM IP Holding B.V.
- Current Assignee Address: NL Almere
- Main IPC: C23C16/455
- IPC: C23C16/455 ; C23C16/458 ; C23C16/46

Abstract:
Various embodiments of the present technology may provide a feature to isolate an upper chamber of a reaction chamber from a lower chamber of a reaction chamber. In one case, a susceptor has a groove along an outer edge that is configured to mate with a spacer plate. A seal is disposed in the groove. In another case, a flow control ring, which rests on the susceptor, has a groove along an outer edge that is configured to mate with the spacer plate.
Information query
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