Invention Publication
- Patent Title: DETERMINING EQUIPMENT CONSTANT UPDATES BY MACHINE LEARNING
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Application No.: US18070448Application Date: 2022-11-28
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Publication No.: US20240176312A1Publication Date: 2024-05-30
- Inventor: Sidharth Bhatia , Roger Lindley , Upendra Ummethala , Thomas Li , Michael Howells , Steven Babayan , Mimi-Diemmy Dao
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Main IPC: G05B13/02
- IPC: G05B13/02 ; G05B13/04

Abstract:
A method includes providing, as input to a first trained machine learning model, trace data associated with one or more substrate processing procedures. The input further includes equipment constants associated with the one or more substrate processing procedures. The input further includes trace data of a first processing chamber. The input further includes equipment constants of the first processing chamber. The method further includes obtaining, as output from the first trained machine learning model, a recommended update to a first equipment constant of the first processing chamber. The method further includes updated the first equipment constant of the first processing chamber responsive to obtaining the output from the first trained machine learning model.
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