Invention Publication
- Patent Title: SEMICONDUCTOR MEMORY DEVICE AND ELECTRONIC SYSTEM INCLUDING THE SAME
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Application No.: US18229296Application Date: 2023-08-02
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Publication No.: US20240188293A1Publication Date: 2024-06-06
- Inventor: Sam Ki KIM , Nam Bin KIM , Ji Woong KIM , Tae Hun KIM , Ki Bong MOON , Sae Rom LEE , Sung-Bok LEE , Jun Hee LIM , Nag Yong CHOI , Sun Gyung HWANG
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Priority: KR 20220166848 2022.12.02
- Main IPC: H10B43/27
- IPC: H10B43/27 ; H10B43/40

Abstract:
A semiconductor memory device including a substrate; a mold structure including gate electrodes and mold insulating layers stacked in a stair shape, channel structures on the substrate, intersecting the gate electrodes, and passing through the mold structure; cell contacts connected to the gate electrodes; a first interlayer insulating layer on the mold structure and covering the channel structures and cell contacts; first metal patterns connected to the channel structures, an upper surface of the first metal patterns being coplanar with an upper surface of the first interlayer insulating layer; second metal patterns connected to the cell contacts, an upper surface of the second metal patterns being coplanar with the upper surface of the first metal patterns; a first blocking layer along the upper surface of the first interlayer insulating layer, the first metal patterns, and the second metal patterns; and a first dummy vias passing through the first blocking layer.
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