Invention Publication
- Patent Title: FLUIDIC-CHANNEL COOLED SUBSTRATES
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Application No.: US18444251Application Date: 2024-02-16
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Publication No.: US20240194564A1Publication Date: 2024-06-13
- Inventor: Jihwan KIM , Oseob JEON , Seungwon IM , Dongwook KANG
- Applicant: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
- Applicant Address: US AZ Scottsdale
- Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
- Current Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
- Current Assignee Address: US AZ Scottsdale
- Main IPC: H01L23/473
- IPC: H01L23/473 ; H01L23/15 ; H01L23/31 ; H01L25/065

Abstract:
In a general aspect, a semiconductor device module includes a ceramic substrate having a first surface and a second surface opposite the first surface, a patterned metal layer disposed on the first surface of the ceramic substrate, a semiconductor die disposed on the patterned metal layer, and a cooling structure disposed on the second surface of the ceramic substrate. The cooling structure includes a plurality of copper sheets defining a plurality of fluidic-cooling channels. At least one copper sheet of the plurality of copper sheets is at least one of coated or plated with a corrosion-resistant material. The module also includes a molding compound that encapsulates the ceramic substrate, the patterned metal layer and the semiconductor die. The molding compound also partially encapsulates the cooling structure, such that a fluidic interface surface of the cooling structure is exposed through the molding compound.
Information query
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