Invention Publication
- Patent Title: THREE-DIMENSIONAL MEMORY DEVICES WITH LATERAL BLOCK ISOLATION STRUCTURES AND METHODS OF FORMING THE SAME
-
Application No.: US18493020Application Date: 2023-10-24
-
Publication No.: US20240196616A1Publication Date: 2024-06-13
- Inventor: Tomohiro KUBO , Akihiro TOBIOKA
- Applicant: SANDISK TECHNOLOGIES LLC
- Applicant Address: US TX ADDISON
- Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee Address: US TX ADDISON
- Main IPC: H10B43/27
- IPC: H10B43/27 ; H01L23/00 ; H01L25/00 ; H01L25/065 ; H01L25/18 ; H10B41/27 ; H10B80/00

Abstract:
A memory device includes an alternating stack of insulating layers and composite layers that alternate along a vertical direction, arrays of memory openings vertically extending through the alternating stack, memory opening fill structures located in the memory openings, and including a vertical semiconductor channel and a respective vertical stack of memory elements, and dielectric isolation structures laterally contacting each of the insulating layers and each of the composite layers. Each of the composite layers includes a combination of a dielectric connection plate and a plurality of electrically conductive layers that laterally extend along a first horizontal direction and that are laterally spaced apart along a second horizontal direction by backside trenches that laterally extend along the first horizontal direction.
Information query