- 专利标题: CAPACITOR AND SEMICONDUCTOR DEVICE INCLUDING THE SAME
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申请号: US18363045申请日: 2023-08-01
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公开(公告)号: US20240213306A1公开(公告)日: 2024-06-27
- 发明人: Sunghyun KIM , Sungchan KANG , Haeryong KIM , Jeonggyu SONG , Cheheung KIM , Jooho LEE
- 申请人: Samsung Electronics Co., Ltd.
- 申请人地址: KR Suwon-si
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Suwon-si
- 优先权: KR 20220186384 2022.12.27
- 主分类号: H01G4/33
- IPC分类号: H01G4/33 ; H01G4/008 ; H01G4/12 ; H01L27/06
摘要:
Provided are a capacitor and a semiconductor device including the same. The capacitor includes a first electrode, a dielectric layer over the first electrode, a second electrode between the first electrode and the dielectric layer, and a third electrode over the dielectric layer and in contact with the dielectric layer such that the dielectric layer is between the second electrode and the third electrode. A thermal expansion coefficient of the first electrode may be greater than a thermal expansion coefficient of the dielectric layer, and a work function of the second electrode may be higher than a work function of the first electrode.
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