Invention Publication
- Patent Title: SILICON-OXIDE-NITRIDE-OXIDE-SILICON MEMORY CELL
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Application No.: US18602040Application Date: 2024-03-12
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Publication No.: US20240215251A1Publication Date: 2024-06-27
- Inventor: Chia-Ching Hsu
- Applicant: UNITED MICROELECTRONICS CORP.
- Applicant Address: TW Hsin-Chu City
- Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee Address: TW Hsin-Chu City
- The original application number of the division: US17177164 2021.02.16
- Main IPC: H10B43/35
- IPC: H10B43/35 ; H01L21/28 ; H01L29/423 ; H01L29/66 ; H01L29/792

Abstract:
A silicon-oxide-nitride-oxide-silicon (SONOS) memory cell includes a memory gate disposed on a substrate, a dielectric layer and two charge trapping layers, wherein the dielectric layer is disposed between the substrate and the memory gate, and the two charge trapping layers are disposed at two opposite sides of the memory gate, wherein each of the charge trapping layers comprises an L-shape cross-sectional profile, and two selective gates disposed on the substrate, thereby constituting a two bit memory cell, wherein a top surface of each selective gate is higher than a top surface of the memory gate.
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