Invention Publication
- Patent Title: PLATING APPARATUS
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Application No.: US17923080Application Date: 2021-06-04
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Publication No.: US20240218553A1Publication Date: 2024-07-04
- Inventor: Masashi SHIMOYAMA , Yasuyuki MASUDA , Kazuhito TSUJI , Ryosuke HIWATASHI
- Applicant: EBARA CORPORATION
- Applicant Address: JP Tokyo
- Assignee: EBARA CORPORATION
- Current Assignee: EBARA CORPORATION
- Current Assignee Address: JP Tokyo
- International Application: PCT/JP2021/021358 2021.06.04
- Date entered country: 2022-11-03
- Main IPC: C25D21/12
- IPC: C25D21/12 ; C25D5/02 ; C25D17/00 ; C25D17/06 ; C25D21/10

Abstract:
An objective of the present invention is to provide a plating apparatus capable of improving uniformity of a plating film formed on a substrate. The plating apparatus includes a plating tank, a substrate holder that holds a substrate, an anode disposed, in the plating tank, facing the substrate held by the substrate holder, and a film thickness measuring module including a sensor that detects a parameter related to a plating film formed on a surface to be plated of the substrate, the film thickness measuring module measuring a film thickness of the plating film based on a detection value of the sensor during a plating treatment.
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