MEASURING METHOD AND MEASURING DEVICE
摘要:
According to one embodiment, a measuring method includes forming a partition including a lower portion provided on a base and an upper portion which protrudes from a side surface of the lower portion, acquiring a first image generated by applying an electron beam to the partition for each of elements constituting the partition, analyzing the first image for each element, and measuring a protrusion amount of an end portion of the upper portion from the side surface of the lower portion based on the analysis result.
信息查询
0/0