- 专利标题: MEASURING METHOD AND MEASURING DEVICE
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申请号: US18391670申请日: 2023-12-21
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公开(公告)号: US20240243017A1公开(公告)日: 2024-07-18
- 发明人: Satoru TOMITA , Noriyuki HIRATA
- 申请人: Japan Display Inc.
- 申请人地址: JP Tokyo
- 专利权人: Japan Display Inc.
- 当前专利权人: Japan Display Inc.
- 当前专利权人地址: JP Tokyo
- 优先权: JP 23003088 2023.01.12
- 主分类号: H01L21/66
- IPC分类号: H01L21/66 ; G06T7/00 ; G06T7/60 ; H10K59/12
摘要:
According to one embodiment, a measuring method includes forming a partition including a lower portion provided on a base and an upper portion which protrudes from a side surface of the lower portion, acquiring a first image generated by applying an electron beam to the partition for each of elements constituting the partition, analyzing the first image for each element, and measuring a protrusion amount of an end portion of the upper portion from the side surface of the lower portion based on the analysis result.
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