Abstract:
According to one embodiment, an inspection device of a display device, includes a first probe block which includes first probes, a probe block attachment which supports the first probe block to enable a position of the first probe block to be set variably, a signal source which supplies a signal to the first probes, and a transmission cable which connects the first probe block with the signal source.
Abstract:
According to one embodiment, a measuring method includes forming a partition including a lower portion provided on a base and an upper portion which protrudes from a side surface of the lower portion, acquiring a first image generated by applying an electron beam to the partition for each of elements constituting the partition, analyzing the first image for each element, and measuring a protrusion amount of an end portion of the upper portion from the side surface of the lower portion based on the analysis result.
Abstract:
According to one embodiment, a measuring method includes forming a partition including a lower portion arranged on a first surface side of a base and an upper portion protruding from a side surface of the lower portion, acquiring a first image including the partition, which is generated by emitting electromagnetic waves from the first surface side of the base or a second surface side opposed to the first surface of the base, analyzing the acquired first image, and measuring an amount of protrusion at which the end portion of the upper portion protrudes from the side surface of the lower portion, based on the analysis result.
Abstract:
According to one embodiment, a measuring method includes forming a partition including a lower portion arranged on a first surface side of a base and an upper portion protruding from a side surface of the lower portion, acquiring a first image including the partition observed from a second surface side opposed to the first surface of the base by an optical microscope, analyzing the acquired first image, and measuring an amount of protrusion by which an end portion of the upper portion protrudes from the side surface of the lower portion, based on the analysis result.
Abstract:
According to one embodiment, a measuring method includes forming a partition including a lower portion arranged on a base and an upper portion protruding from a side surface of the lower portion, acquiring a first image generated by detecting a secondary electron generated by emitting an electron beam including a primary electron to an area including at least a part of the side surface of the lower portion and at least a part of an end portion of the upper portion, analyzing the first image, and measuring an amount of protrusion by which the end portion of the upper portion protrudes from the side surface of the lower portion, based on the analysis result.