INSPECTION DEVICE OF DISPLAY DEVICE, METHOD OF INSPECTING MOTHER SUBSTRATE FOR DISPLAY DEVICE, AND DISPLAY DEVICE
    1.
    发明申请
    INSPECTION DEVICE OF DISPLAY DEVICE, METHOD OF INSPECTING MOTHER SUBSTRATE FOR DISPLAY DEVICE, AND DISPLAY DEVICE 审中-公开
    显示装置的检查装置,检查用于显示装置的母体基板的方法和显示装置

    公开(公告)号:US20160363612A1

    公开(公告)日:2016-12-15

    申请号:US15171346

    申请日:2016-06-02

    CPC classification number: G09G3/006 G06F3/0416 G06F3/044 G09G3/3648

    Abstract: According to one embodiment, an inspection device of a display device, includes a first probe block which includes first probes, a probe block attachment which supports the first probe block to enable a position of the first probe block to be set variably, a signal source which supplies a signal to the first probes, and a transmission cable which connects the first probe block with the signal source.

    Abstract translation: 根据一个实施例,显示装置的检查装置包括第一探针块,其包括第一探针,探针块附件,其支撑第一探针块以使第一探针块的位置可变地设定;信号源 其向第一探针提供信号,以及将第一探测块与信号源连接的传输电缆。

    MEASURING METHOD AND MEASURING DEVICE
    5.
    发明公开

    公开(公告)号:US20240085355A1

    公开(公告)日:2024-03-14

    申请号:US18466824

    申请日:2023-09-14

    Inventor: Satoru TOMITA

    CPC classification number: G01N23/2251

    Abstract: According to one embodiment, a measuring method includes forming a partition including a lower portion arranged on a base and an upper portion protruding from a side surface of the lower portion, acquiring a first image generated by detecting a secondary electron generated by emitting an electron beam including a primary electron to an area including at least a part of the side surface of the lower portion and at least a part of an end portion of the upper portion, analyzing the first image, and measuring an amount of protrusion by which the end portion of the upper portion protrudes from the side surface of the lower portion, based on the analysis result.

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