- 专利标题: WINDOW MATERIAL FOR OPTICAL ELEMENT, LID FOR OPTICAL ELEMENT PACKAGE, AND OPTICAL ELEMENT PACKAGE
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申请号: US18407974申请日: 2024-01-09
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公开(公告)号: US20240250223A1公开(公告)日: 2024-07-25
- 发明人: Harunobu MATSUI , Daijitsu HARADA , Masaki TAKEUCHI
- 申请人: Shin-Etsu Chemical Co., Ltd.
- 申请人地址: JP Tokyo
- 专利权人: Shin-Etsu Chemical Co., Ltd.
- 当前专利权人: Shin-Etsu Chemical Co., Ltd.
- 当前专利权人地址: JP Tokyo
- 优先权: JP 23006919 2023.01.20
- 主分类号: H01L33/58
- IPC分类号: H01L33/58 ; G02B1/115 ; H01L33/44 ; H01L33/48
摘要:
A window material for an optical element, including: a synthetic quartz glass substrate having a flat plate shape and having main surfaces through which light is transmitted, at least one of the main surfaces being a rough surface; and an antireflection film formed on the at least one main surface of the synthetic quartz glass substrate, the main surface being the rough surface. The window material for an optical element of the present invention is easy in shape processing, undergoes little temporal change in a wide wavelength region and is stable over a long period of time, and has high total light transmittance of distributed light.
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