- 专利标题: Equipment For Manufacturing Light-Emitting Device
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申请号: US18578100申请日: 2022-07-05
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公开(公告)号: US20240266195A1公开(公告)日: 2024-08-08
- 发明人: Shunpei YAMAZAKI , Yasuhiro JINBO , Tomoya AOYAMA , Daiki NAKAMURA
- 申请人: Semiconductor Energy Laboratory Co., Ltd.
- 申请人地址: JP Kanagawa-ken
- 专利权人: Semiconductor Energy Laboratory Co., Ltd.
- 当前专利权人: Semiconductor Energy Laboratory Co., Ltd.
- 当前专利权人地址: JP Kanagawa-ken
- 优先权: JP 21117711 2021.07.16
- 国际申请: PCT/IB2022/056190 2022.07.05
- 进入国家日期: 2024-01-10
- 主分类号: H01L21/67
- IPC分类号: H01L21/67
摘要:
Manufacturing equipment with which steps from processing to sealing of an organic compound film can be continuously performed is provided. The manufacturing equipment can continuously perform a patterning step of a light-emitting device and a sealing step to prevent the top surfaces and side surfaces of organic layers from being exposed to the air, which allows formation of the light-emitting device which has a minute structure, high luminance, and high reliability. This manufacturing equipment can be built in an in-line system where apparatuses are arranged according to the order of process steps for the light-emitting device, resulting in high throughput manufacturing.
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