- 专利标题: PULSED POWER SYSTEMS WITH CONTROLLED REACTOR RESET
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申请号: US18568442申请日: 2022-06-06
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公开(公告)号: US20240283210A1公开(公告)日: 2024-08-22
- 发明人: Paul Christopher Melcher , Yuda Wang , Changqi You
- 申请人: Cymer, LLC
- 申请人地址: US CA San Diego
- 专利权人: Cymer, LLC
- 当前专利权人: Cymer, LLC
- 当前专利权人地址: US CA San Diego
- 国际申请: PCT/US2022/032333 2022.06.06
- 进入国家日期: 2023-12-08
- 主分类号: H01S3/097
- IPC分类号: H01S3/097 ; G03F7/00 ; G03F7/20 ; H01S3/083 ; H01S3/225 ; H01S3/23
摘要:
A pulsed power circuit including one or more magnetic switches respectively implemented as one or more inductors having saturable cores wherein, after a discharge pulse, each saturable core is repeatably reset to an initial bias point on its magnetization curve by a reset pulse having variable characteristics determined, for example, by chamber operating conditions so that the saturable core is able to function reliably and consistently.
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