• 专利标题: VACUUM PUMP, ROTATING BODY, COVER PORTION, AND MANUFACTURING METHOD OF ROTATING BODY
  • 申请号: US18258869
    申请日: 2022-01-11
  • 公开(公告)号: US20240295227A1
    公开(公告)日: 2024-09-05
  • 发明人: Tooru Miwata
  • 申请人: Edwards Japan Limited
  • 申请人地址: JP Yachiyo-shi, Chiba
  • 专利权人: Edwards Japan Limited
  • 当前专利权人: Edwards Japan Limited
  • 当前专利权人地址: JP Yachiyo-shi, Chiba
  • 优先权: JP 21007344 2021.01.20
  • 国际申请: PCT/JP2022/000595 2022.01.11
  • 进入国家日期: 2023-06-22
  • 主分类号: F04D29/66
  • IPC分类号: F04D29/66 F04D19/04 F04D29/60
VACUUM PUMP, ROTATING BODY, COVER PORTION, AND MANUFACTURING METHOD OF ROTATING BODY
摘要:
A vacuum pump which prevents dust generation from a shaft by avoiding contact between a top portion of the shaft and corrosive gas and includes a balance correction function for a rotating body. A vacuum pump includes a rotating body including a rotating shaft and a rotor blade which has a through hole, through which a top portion of the rotating shaft is caused to pass, and is fixed with the top portion, and a cover portion fixed to the rotating to cover the top portion and the through hole. The cover portion includes a balance correction function for the rotating body and corrosion resistance to exhaust gas. The cover portion, prevents contact between the top portion and corrosive gas and prevents dust generation from the shaft.
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