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公开(公告)号:US12270405B2
公开(公告)日:2025-04-08
申请号:US18258886
申请日:2022-01-11
Applicant: Edwards Japan Limited
Inventor: Tooru Miwata , Yoshiyuki Sakaguchi
IPC: F04D19/04
Abstract: There are provided a vacuum pump which can effectively prevent stress corrosion cracking of a rotating body and has excellent corrosion resistance, and a rotating body of the vacuum pump. In a vacuum pump (e.g., a turbo-molecular pump 100) exhausting gas by rotation of a rotating body 103, the rotating body 103 has, on a surface thereof, a first area 1 covered with a first surface treatment layer 1A and a second area 2 covered with a second surface treatment layer 2A, and a boundary portion 3 between the first area 1 and the second area 2 has an area in which the surface treatment layers 1A and 1B of the first and second areas 1 and 2 overlap each other.
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公开(公告)号:US20240295227A1
公开(公告)日:2024-09-05
申请号:US18258869
申请日:2022-01-11
Applicant: Edwards Japan Limited
Inventor: Tooru Miwata
CPC classification number: F04D29/662 , F04D19/042 , F04D29/601
Abstract: A vacuum pump which prevents dust generation from a shaft by avoiding contact between a top portion of the shaft and corrosive gas and includes a balance correction function for a rotating body. A vacuum pump includes a rotating body including a rotating shaft and a rotor blade which has a through hole, through which a top portion of the rotating shaft is caused to pass, and is fixed with the top portion, and a cover portion fixed to the rotating to cover the top portion and the through hole. The cover portion includes a balance correction function for the rotating body and corrosion resistance to exhaust gas. The cover portion, prevents contact between the top portion and corrosive gas and prevents dust generation from the shaft.
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公开(公告)号:US11542950B2
公开(公告)日:2023-01-03
申请号:US17040799
申请日:2019-03-20
Applicant: Edwards Japan Limited
Inventor: Tooru Miwata , Yoshiyuki Takai , Yoshiyuki Sakaguchi
IPC: F04D19/04 , F04D29/048 , F04D29/58
Abstract: A vacuum pump capable of suppressing the solidification of gas in a normal operation of a pump is provided. Provided is a vacuum pump including a casing that has an inlet port for sucking gas from outside and an outlet port for exhausting the gas to the outside; a turbo-molecular-pump mechanism that is disposed in the casing and includes rotor blades and stator blades alternately arranged in multiple stages in an axial direction; a thread-groove-pump mechanism that is disposed in the casing and is connectedly disposed on an exhaust side of the turbo-molecular-pump mechanism; first temperature regulating means that is configured to regulate cooling of the turbo-molecular-pump mechanism; and second temperature regulating means that is configured to regulate heating of the thread-groove-pump mechanism.
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公开(公告)号:US10823200B2
公开(公告)日:2020-11-03
申请号:US15780155
申请日:2016-12-08
Applicant: Edwards Japan Limited
Inventor: Yoshiyuki Sakaguchi , Tooru Miwata , Kengo Saegusa , Nahoko Yoshihara
Abstract: A thread groove pump portion, which is an exhaust element, is structured such that a Siegbahn structure is attached onto a cylindrical thread, and such that respective parts are connected to each other at this attachment section. A flow channel of the Siegbahn portion and a flow channel of the cylindrical thread (the thread groove pump portion) are connected to each other so as to substantially form a right angle when viewed from an axis direction of the vacuum pump, thus, the flow channel of the Siegbahn portion and the flow channel of the thread groove pump portion are connected to each other. the length of a compression flow channel of the thread groove pump portion can be increased in a radial direction due to the connected Siegbahn portion.
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公开(公告)号:US12188477B2
公开(公告)日:2025-01-07
申请号:US18044815
申请日:2021-10-01
Applicant: Edwards Japan Limited
Inventor: Tooru Miwata , Yoshiyuki Sakaguchi , Yoshiyuki Takai , Yasuhiro Shibata
Abstract: A lower portion of a cylindrical portion provided in a vacuum pump on the outlet port side has an extension portion extending to a further downstream side than a stationary part of a thread groove exhaust element. In the extension portion, the smaller the outer diameter, the smaller the stress applied to the inner diameter side during rotation. As such, the configuration including a reduced diameter portion reduces the stress applied to the inner diameter side of the cylindrical portion without lowering the rotation speed of the rotating body. Additionally, providing a gradually decreasing diameter structure in the extension portion reduces stress concentration at the reduced diameter portion.
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公开(公告)号:US20220412369A1
公开(公告)日:2022-12-29
申请号:US17762992
申请日:2020-09-18
Applicant: Edwards Japan Limited
Inventor: Tooru Miwata , Yoshiyuki Takai
IPC: F04D29/10 , F04D19/04 , F04D29/58 , F04D29/053
Abstract: A vacuum pump which suppresses occurrence of deposition caused by an exhaust gas is obtained. The vacuum pump includes: a pump portion including a shaft portion, a rotor disposed on an outer peripheral side of the shaft portion, and a stator disposed on the outer peripheral side of the rotor; a channel of the exhaust gas from the pump portion to an outlet port; and a shielding portion which suppresses contact of the exhaust gas with the shaft portion in the channel. Further, an end portion of the shielding portion has a surface opposed to the rotor.
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公开(公告)号:US20210207619A1
公开(公告)日:2021-07-08
申请号:US17057940
申请日:2018-05-30
Applicant: Edwards Japan Limited
Inventor: Tooru Miwata , Yoshiyuki Takai , Yoshiyuki Sakaguchi
Abstract: A cooling component includes a plurality of port pairs a flow path through which refrigerant flows, the refrigerant communicating with each of the ports of the plurality of port pairs, and a setting means for setting a usage pattern of the plurality of port pairs. The plurality of port pairs are provided along a circumferential direction of the casing. The setting means sets a selected port pair such that the refrigerant is supplied from outside into the flow path using the first port of the selected port pair and refrigerant is discharged from the flow path to outside using the second port of the selected port pair, and sets another port pair such that the refrigerant cannot be supplied from outside into the flow path or discharged from the flow path using the other port pair.
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公开(公告)号:US20200166041A1
公开(公告)日:2020-05-28
申请号:US16612911
申请日:2018-04-20
Applicant: Edwards Japan Limited
Inventor: Yongwei Shi , Tooru Miwata , Yoshiyuki Sakaguchi
Abstract: Bobbins of an annular electromagnet each have a bobbin body that has a coil wire wound around an outer periphery thereof and is attached to a respective tooth of an annular stator core by having the corresponding tooth inserted therethrough. A first flange portion in a rectangular hallow shape is provided on an end surface of the bobbin body near the center of the annular stator core and a second flange portion in a rectangular hallow shape is provided on the other end surface of the bobbin body. A coil winding amount increasing means is formed at least on the first flange portion or the second flange portion and increases the amount of winding of the coil wire wound around the bobbin body.
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公开(公告)号:US12292058B2
公开(公告)日:2025-05-06
申请号:US17769161
申请日:2020-10-27
Applicant: Edwards Japan Limited
Inventor: Tooru Miwata , Yoshiyuki Takai
Abstract: A vacuum pump is provided, which is capable of preventing a water cooling spacer, which is one component of a casing, from being damaged by destruction of an interior component. The vacuum pump includes a casing having an inlet port, a stator column provided upright inside the casing, and a rotating body shaped to surround an outer periphery of the stator column, with gas being sucked in from the inlet port by rotation of the rotating body, wherein the casing is composed of a plurality of components including a water cooling spacer having a water cooling pipe disposed therein, and the water cooling spacer is made of an aluminum alloy casting material having an elongation of 5% or more as a mechanical material property.
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公开(公告)号:US20240280115A1
公开(公告)日:2024-08-22
申请号:US18571958
申请日:2022-07-21
Applicant: Edwards Japan Limited
Inventor: Yoshiyuki Takai , Tooru Miwata , Yoshiyuki Sakaguchi
CPC classification number: F04D29/601 , F04D19/04 , F04D29/083
Abstract: A vacuum pump includes a contact portion that contacts a jig used to adjust the height of a seal member in an axial direction. At the time of assembling the vacuum pump in which a pump fixing component is arranged opposed to the outer periphery of a rotating body, the jig is positioned by the contact portion with the pump fixing component arranged on a base, and the pump fixing component is pressed in the direction of the base by the pressing portion of the positioned jig to adjust the height of the seal member in the axial direction. The pump fixing component is entirely lowered in the direction of the base by the adjustment.
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