Invention Publication
- Patent Title: SEMICONDUCTOR MEMORY DEVICE
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Application No.: US18666035Application Date: 2024-05-16
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Publication No.: US20240306393A1Publication Date: 2024-09-12
- Inventor: Toshifumi MINAMI , Atsuhiro SATO , Keisuke YONEHAMA , Yasuyuki BABA , Hiroshi SHINOHARA , Hideyuki KAMATA , Teppei HIGASHITSUJI
- Applicant: Kioxia Corporation
- Applicant Address: JP Tokyo
- Assignee: Kioxia Corporation
- Current Assignee: Kioxia Corporation
- Current Assignee Address: JP Tokyo
- Priority: JP 14182641 2014.09.08
- Main IPC: H10B43/27
- IPC: H10B43/27 ; H01L29/792 ; H10B41/20 ; H10B41/27 ; H10B43/00 ; H10B43/10 ; H10B43/20 ; H10B43/35

Abstract:
A semiconductor memory device includes a conducting layer and an insulating layer that are disposed above a semiconductor substrate, a plurality of pillars that extend in a direction which crosses a surface of the semiconductor substrate, and a plate that is disposed between the plurality of pillars and extends in the same direction as the pillars. A surface of the plate, which faces the pillars, has convex portions and non-convex portions.
Public/Granted literature
- US12274065B2 Semiconductor memory device Public/Granted day:2025-04-08
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