Invention Publication
- Patent Title: METHOD AND APPARATUS FOR THE THERMAL POST-TREATMENT OF AT LEAST ONE SIC VOLUME MONOCRYSTAL
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Application No.: US18598090Application Date: 2024-03-07
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Publication No.: US20240318352A1Publication Date: 2024-09-26
- Inventor: Bernhard Ecker , Maximilian Kowasch , Ralf Müller , Philipp Schuh , Matthias Stockmeier , Daisuke Takegawa , Michael Vogel , Arnd-Dietrich Weber
- Applicant: SiCrystal GmbH
- Applicant Address: DE Nürnberg
- Assignee: SiCrystal GmbH
- Current Assignee: SiCrystal GmbH
- Current Assignee Address: DE Nürnberg
- Priority: EP 163761.2 2023.03.23
- Main IPC: C30B33/02
- IPC: C30B33/02 ; C30B29/36 ; F27B17/00 ; F27D5/00

Abstract:
Thermal post-treatment of a silicon carbide (SiC) volume monocrystal which has a substantially cylindrical basic shape with a crystal length in an axial direction, a crystal diameter in a radial direction, a crystal central longitudinal axis extending in the axial direction, and with three boundary surfaces, namely, a bottom surface, a top surface and a circumferential edge surface. The SiC volume monocrystal is brought to a post-treatment temperature in order to reduce mechanical stresses present in the SiC volume monocrystal after completion of the previous growth, wherein an inhomogeneous temperature profile with a radial thermal gradient is set in the SiC volume monocrystal, which rises continuously from the crystal central longitudinal axis to the circumferential edge surface, and a heat exchange of the SiC volume monocrystal with a surrounding free space takes place via free heat radiation on at least two of the three boundary surfaces.
Information query
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