Invention Publication
- Patent Title: COMPLEMENTARY FIELD EFFECT TRANSISTOR CELLS AND METHODS OF FABRICATING THE SAME
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Application No.: US18608650Application Date: 2024-03-18
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Publication No.: US20240321889A1Publication Date: 2024-09-26
- Inventor: Gaspard Hiblot , Gioele Mirabelli
- Applicant: IMEC VZW
- Applicant Address: BE Leuven
- Assignee: IMEC VZW
- Current Assignee: IMEC VZW
- Current Assignee Address: BE Leuven
- Priority: EP 163364.5 2023.03.22
- Main IPC: H01L27/092
- IPC: H01L27/092 ; H01L21/822 ; H01L21/8238 ; H01L23/528 ; H01L29/06 ; H01L29/423 ; H01L29/66 ; H01L29/775

Abstract:
The disclosed technology generally relates to a complementary field effect transistor (CFET) cell. In one aspect, the CFET cell includes: a first transistor structure arranged in a first tier of the CFET cell; a second transistor structure arranged in a second tier of the CFET cell above the first tier; a set of top signal routing lines formed in a first metal layer above the second tier and connected to the first and the second transistor structures from above; and at least one bottom signal routing line formed in a second metal layer below the first tier and connected to the first transistor structure from below. The disclosed technology also generally relates to a method of fabricating a CFET cell.
Information query
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