Invention Publication
- Patent Title: COATINGS THAT CONTAIN FLUORINATED YTTRIUM OXIDE AND A METAL OXIDE, AND METHODS OF PREPARING AND USING THE COATINGS
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Application No.: US18751650Application Date: 2024-06-24
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Publication No.: US20240344195A1Publication Date: 2024-10-17
- Inventor: Carlo Waldfried , Stephen Longo
- Applicant: ENTEGRIS, INC.
- Applicant Address: US MA Billerica
- Assignee: ENTEGRIS, INC.
- Current Assignee: ENTEGRIS, INC.
- Current Assignee Address: US MA Billerica
- Main IPC: C23C16/40
- IPC: C23C16/40 ; C04B35/488 ; C04B35/515 ; C04B35/553 ; C04B35/622 ; C23C16/56
Abstract:
Described are coatings that contain of fluorinated yttrium oxide and a metal oxide; methods of preparing these coatings; substrates, surfaces, equipment, and components of equipment that include a coating that contains a combination of fluorinated yttrium oxide and a metal oxide; and methods of preparing and using the coatings and coated substrates.
Public/Granted literature
- US2663514A Cutter for film take-up magazines Public/Granted day:1953-12-22
Information query
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