MANAGING ADHESIVE MATERIAL SHAPING USING STRUCTURE ARRAYS
摘要:
An article of manufacture comprises: at least a portion of a wafer comprising a substate and one or more layers fabricated on the substrate; one or more integrated photonic structures in the portion of the wafer, where at least a first integrated photonic structure of the one or more integrated photonic structures is associated with an electromagnetic wave propagation region that extends beyond a first surface of a first layer of the one or more layers; an array of structures arranged in a two-dimensional pattern on a portion of the first surface; and an adhesive material making contact with the first surface and with at least a majority of the structures in the array of structures.
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