Invention Publication
- Patent Title: MEMORY DEVICE AND MANUFACTURING METHOD THEREOF
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Application No.: US18342713Application Date: 2023-06-27
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Publication No.: US20240349499A1Publication Date: 2024-10-17
- Inventor: Tzu-Yun Huang , Chung-Hsien Liu
- Applicant: Winbond Electronics Corp.
- Applicant Address: TW Taichung City
- Assignee: Winbond Electronics Corp.
- Current Assignee: Winbond Electronics Corp.
- Current Assignee Address: TW Taichung City
- Priority: TW 2113753 2023.04.13
- Main IPC: H10B41/35
- IPC: H10B41/35 ; H01L29/423 ; H10B41/10

Abstract:
A memory device and a manufacturing method thereof are provided. The memory device includes: active regions, defined in a semiconductor substrate; word line structures, formed on the semiconductor substrate, and intersected with the active regions, wherein each of the word line structures includes a floating gate and a control gate stacked on the floating gate; first protection layers, respectively covering an upper part of the control gate in one of the word line structures, wherein a bottom end of the control gate in each word line structure is lower than a bottom end of each first protection layer; and a second protection layer, covering the first protection layers, and wrapping the word line structures.
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