- 专利标题: JIG FOR ALIGNMENT IN RELATION TO A PROCESS CHAMBER, AND RELATED APPARATUS, SYSTEMS, AND METHODS
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申请号: US18140295申请日: 2023-04-27
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公开(公告)号: US20240360560A1公开(公告)日: 2024-10-31
- 发明人: Kalaivanan MOHANADASS , Shu-Kwan LAU , Daniel COSCHIGANO , Jayanth Devaraja Swamy
- 申请人: Applied Materials, Inc.
- 申请人地址: US CA Santa Clara
- 专利权人: Applied Materials, Inc.
- 当前专利权人: Applied Materials, Inc.
- 当前专利权人地址: US CA Santa Clara
- 主分类号: C23C16/52
- IPC分类号: C23C16/52 ; C23C16/46 ; G01S17/08
摘要:
An alignment assembly includes a sensor and a lid that includes a first window. The alignment assembly also includes a rotary joint coupled to the lid. The alignment assembly also includes a jig coupled to the rotary joint and pivotable relative to the lid about the rotary joint. The jig includes an extendable arm that is moveable from a retracted position where the sensor is disposed in a first position above the first window to an extended position where the sensor is disposed at a second position above the first window. The alignment assembly also includes a lock configured to selectively pivotably lock the jig to the lid and also to selectively lock the extendable arm in the retracted position or the extended position.
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