公开(公告)号：US20240360560A1

公开(公告)日：2024-10-31

申请号：US18140295

申请日：2023-04-27

申请人： Applied Materials, Inc.

发明人： Kalaivanan MOHANADASS ,  Shu-Kwan LAU ,  Daniel COSCHIGANO ,  Jayanth Devaraja Swamy

IPC分类号： C23C16/52 ,  C23C16/46 ,  G01S17/08

CPC分类号： C23C16/52 ,  C23C16/46 ,  G01S17/08

摘要： An alignment assembly includes a sensor and a lid that includes a first window. The alignment assembly also includes a rotary joint coupled to the lid. The alignment assembly also includes a jig coupled to the rotary joint and pivotable relative to the lid about the rotary joint. The jig includes an extendable arm that is moveable from a retracted position where the sensor is disposed in a first position above the first window to an extended position where the sensor is disposed at a second position above the first window. The alignment assembly also includes a lock configured to selectively pivotably lock the jig to the lid and also to selectively lock the extendable arm in the retracted position or the extended position.