公开(公告)号：US20240360560A1

公开(公告)日：2024-10-31

申请号：US18140295

申请日：2023-04-27

申请人： Applied Materials, Inc.

发明人： Kalaivanan MOHANADASS ,  Shu-Kwan LAU ,  Daniel COSCHIGANO ,  Jayanth Devaraja Swamy

IPC分类号： C23C16/52 ,  C23C16/46 ,  G01S17/08

CPC分类号： C23C16/52 ,  C23C16/46 ,  G01S17/08

摘要： An alignment assembly includes a sensor and a lid that includes a first window. The alignment assembly also includes a rotary joint coupled to the lid. The alignment assembly also includes a jig coupled to the rotary joint and pivotable relative to the lid about the rotary joint. The jig includes an extendable arm that is moveable from a retracted position where the sensor is disposed in a first position above the first window to an extended position where the sensor is disposed at a second position above the first window. The alignment assembly also includes a lock configured to selectively pivotably lock the jig to the lid and also to selectively lock the extendable arm in the retracted position or the extended position.

公开(公告)号：US20240254627A1

公开(公告)日：2024-08-01

申请号：US18122484

申请日：2023-03-16

申请人： Applied Materials, Inc.

发明人： Raja Murali DHAMODHARAN ,  Kalaivanan MOHANADASS ,  Aniketnitin PATIL ,  Martin Jeffrey SALINAS ,  Shu-Kwan LAU

IPC分类号： C23C16/455 ,  C23C16/458 ,  C30B25/12 ,  C30B25/14

CPC分类号： C23C16/45563 ,  C23C16/4586 ,  C30B25/12 ,  C30B25/14

摘要： Embodiments of the present disclosure relate to injectors, liners, process kits, processing chambers, and related methods for gas flow in batch processing operations. In one or more embodiments, the liners facilitate gas flow uniformity in batch processing. In one or more embodiments, a liner includes a plurality of inlet openings on an inlet side, the plurality of inlet openings extending into an outer face of the liner. The plurality of inlet openings include a plurality of first inlet openings that include a first row extending into a first side face, and a second row extending into a second side face. The plurality of inlet openings include a plurality of second inlet openings extending between an inner face and the outer face. The liner includes one or more outlet openings on an outlet side. The outlet side opposes the inlet side. The one or more outlet openings extend into the inner face.