Invention Application
- Patent Title: BACK SIDE SIGNAL ROUTING IN A CIRCUIT WITH A RELAY CELL
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Application No.: US18784733Application Date: 2024-07-25
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Publication No.: US20240379554A1Publication Date: 2024-11-14
- Inventor: Shih-Wei PENG , Wei-Cheng LIN , Jiann-Tyng TZENG
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Main IPC: H01L23/528
- IPC: H01L23/528 ; H01L23/48 ; H01L23/522

Abstract:
Apparatus and methods for back side routing a data signal in a semiconductor device are described. In one example, a described semiconductor cell structure includes: a dummy device region at a front side of the semiconductor cell structure; a metal layer including a plurality of metal lines at a back side of the semiconductor cell structure; a dielectric layer formed between the dummy device region and the metal layer; an inner metal disposed within the dielectric layer; at least one first via that is formed through the dielectric layer and electrically connects the inner metal to the plurality of metal lines at the back side; and at least one second via that is formed in the dielectric layer and physically coupled between the inner metal and the dummy device region at the front side.
Information query
IPC分类: