Invention Application
- Patent Title: PIEZOELECTRIC DEVICE HAVING PIEZOELECTRIC STRUCTURE DISPOSED BETWEEN PATTERNED CONDUCTIVE STRUCTURES
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Application No.: US18321268Application Date: 2023-05-22
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Publication No.: US20240397828A1Publication Date: 2024-11-28
- Inventor: Ching-Hui Lin , Yi-Hsien Chang , Chun-Ren Cheng , Shih-Fen Huang , Fu-Chun Huang , Chao-Hung Chu , Po-Chen Yeh
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsinchu
- Main IPC: H10N30/87
- IPC: H10N30/87 ; H10N30/057 ; H10N30/063 ; H10N30/072 ; H10N30/50

Abstract:
Various embodiments of the present disclosure are directed towards a piezoelectric device including a piezoelectric structure over a substrate. A first conductive structure is disposed on a lower surface of the piezoelectric structure. The first conductive structure includes one or more first movable elements directly contacting the piezoelectric structure. A second conductive structure is disposed on an upper surface of the piezoelectric structure. The second conductive structure includes one or more second movable elements directly contacting the piezoelectric structure. The one or more second movable elements directly overlie the one or more first movable elements.
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