Invention Application
- Patent Title: SUBSTRATE TREATMENT SYSTEM
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Application No.: US18755641Application Date: 2024-06-26
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Publication No.: US20250029861A1Publication Date: 2025-01-23
- Inventor: Akihiro IWASAKI , Tsuyoshi TOMITA , Shinichi TANIGUCHI
- Applicant: SCREEN Holdings Co., Ltd.
- Applicant Address: JP Kyoto
- Assignee: SCREEN Holdings Co., Ltd.
- Current Assignee: SCREEN Holdings Co., Ltd.
- Current Assignee Address: JP Kyoto
- Priority: JP2023-104913 20230627
- Main IPC: H01L21/677
- IPC: H01L21/677

Abstract:
In a substrate treatment system, a stocker device, a single-wafer treatment device, an interface device, and a batch treatment device are disposed in a line and linearly in this order. A first transport robot of the stocker device transports a carrier placed on a load port to a stocker device side position. A carrier transport mechanism transports the carrier from the stocker device side position to an interface device side position. A second transport robot of the interface device transports the carrier from the interface device side position to a shelf. The batch treatment device takes out a plurality of substrates from the carrier transported to the shelf, and performs predetermined batch treatment on the plurality of taken-out substrates. The single-wafer treatment device performs treatment on a plurality of substrates one by one.
Information query
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