INTEGRATED ELECTRICAL AND OPTICAL APPARATUS FOR ELECTRICAL CHARACTERIZATION AND LASER ANNEALING
Abstract:
An apparatus comprises optical apparatus, and electrical characterization apparatus. The optical apparatus and the electrical characterization apparatus comprise an integrated configuration to perform laser annealing operations for tuning junction resistances of superconducting tunnel junction devices on a quantum chip, and to perform in-situ resistance measurements to measure the junction resistances of the superconducting tunnel junction devices on the quantum chip.
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