Invention Application
- Patent Title: INTEGRATED ELECTRICAL AND OPTICAL APPARATUS FOR ELECTRICAL CHARACTERIZATION AND LASER ANNEALING
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Application No.: US18236380Application Date: 2023-08-21
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Publication No.: US20250072297A1Publication Date: 2025-02-27
- Inventor: Russell A. Budd , Jason S. Orcutt , Eric Zhang , Yves Martin
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Main IPC: H10N60/01
- IPC: H10N60/01 ; H01L21/66

Abstract:
An apparatus comprises optical apparatus, and electrical characterization apparatus. The optical apparatus and the electrical characterization apparatus comprise an integrated configuration to perform laser annealing operations for tuning junction resistances of superconducting tunnel junction devices on a quantum chip, and to perform in-situ resistance measurements to measure the junction resistances of the superconducting tunnel junction devices on the quantum chip.
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