Invention Application
- Patent Title: SANDWICH STRUCTURES FOR MICROELECTROMECHANICAL SYSTEM MICRO-MIRRORS
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Application No.: US18822580Application Date: 2024-09-03
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Publication No.: US20250091858A1Publication Date: 2025-03-20
- Inventor: Theresa LUTZ , Malika BELLA , Stephan Gerhard ALBERT , Andre BROCKMEIER , Mohanraj SOUNDARA PANDIAN , Thomas BEVER
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Main IPC: B81B3/00
- IPC: B81B3/00 ; B81C1/00

Abstract:
A microelectromechanical system (MEMS) mirror device includes a frame that defines a frame cavity; a suspension assembly; and a mirror body coupled to the frame by the suspension assembly such that the mirror body is suspended over the frame cavity. The mirror body comprises a sandwich structure that includes a front plate, a back plate, and a hollow core assembly arranged between the front plate and the back plate. The front plate and the back plate define a thickness dimension of the mirror body. The hollow core assembly includes a plurality of support structures that extend between the front plate and the back plate and define a plurality of cavities between the front plate and the back plate.
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